The inline tube PECVD loading and unloading machine is to automatically load wafers from wafer box to PECVD quarts boat or unload them from boat to wafer box.
Benefits:
1. UPH: 6000 pcs/hr;
2. Ultra-low damage rate:≤0.03%;
3. Reserved PL station to accommodate area scan and line scan AOI cameras;
4. softtouch design concept to reduce silicon damage rate