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Wafer Nondestructive Dicing Machine
Description:
Wafer nondestructive dicing machine uses customized inner silicon dicing laser with both penetration rate and focus quality ensured. With high-speed air floating platform, closed-loop CNC system and high-resolution CCD positioning technology, it supports LBC control of beam trimming, multi-focus and random power control to realize high quality nondestructive dicing. The product has an independent intellectual property.
Benefits:
1. By changing light spot shape, cutting quality and efficiency of wafer particle can be enhanced;
2. Support coaxial fast focus, rapid thickness measuring, high-speed & real-time height compensation;
3. Ceramic tray design: compatible with 8' and 12' wafers; infrared imaging module can be customized;
4. Laser: fiber optic laser, with low power consumption and purely fan cooling;
5. Modular design; each component allows customization on demand;
6. Light circuit dismantling free, installation time<1 day
Multi-focus & random-power control
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