High availability, capacity, compatibility
Monosilicon Texturing Washing Machine
Used to form the "pyramid" suede on monocrystal wafers through chemical etching, and clean and dry the suede.
High availability, high capacity, high compatibility
Chain-type BSG Cleaning Machine & Alkaline Polishing, Etching, and Cleaning Machine
To remove backside BSG of diffused silicone, and perform chemical corrosion, polishing, etching, cleaning, and realize backside micro texturing to align with other processes
High availability, high capacity, high compatibility
Chain-type PSG Cleaning Machine & Plating Removal and Cleaning Machine
Remove frontside PSG for annealed silicon wafer and, and perform chemical corrosion for frontside winding plating and cleaning of poly silicon
High capacity, low damage rate, customized demand
Auto Loader/Unloader for Alkali Polishing
It is used to automatically put wafers on etching and cleaning machine from wafer containers. It can be customized on demand, and achieve seamless connection with the master machine of the client
High capacity, low damage rate
Inline Diffusion/Annealing Automatic Loading and Unloading Machine
a device that automatically places the pre-diffusion silicon wafer from the basket into the quartz boat, and then automatically sends it to the diffusion oven. After that, the diffused silicon wafer is automatically removed from the quartz boat to basket
High efficiency, low damage rate, uptime up to 98.5%
RPD Automation Machine
RPD automation machine is used to automatically load wafers from wafer box to trays and send them to RPD main body, and after wafers finish RPD, loads them to wafer box